VACUUM PIPING

0001 1 0002 1 0003 1

1701MANIFOLD

→ Go to FIG 17-01

17341PHOSE, AIR

main17341-11460×2i1GDFTV..GDY231..CBU202108-202305

17578BCLAMP, PIPE

main17578-11080i1GDFTV..GDY231..CBU202108-202305

25733APIPE, VACUUM, NO.1

main25733-0E010i1GDFTV..GDY231..CBU202108-202305

(L)

main25733-11010i1GDFTV..GDY231..CBU202108-202206

(J)

25734PIPE, VACUUM, NO.2

main25734-0E010i1GDFTV..GDY231..CBU202206-202305

(J)

main25734-11010i1GDFTV..GDY231..CBU202108-202206

(J)

8401SWITCH & RELAY & COMPUTER

→ Go to FIG 84-01

89639ECLAMP

main89639-26040×2iGDY231..CBU202108-202305

9017906274

main90179-06274

9167180616

main91671-80616

9167180820

main91671-80820

9613241000

main96132-41000

9613741301

main96137-41301

12 parts on this diagram · 3 diagrams in section